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    • Anodized Macroporous Silicon Anode for Integrationof Lithium-Ion Batteries on Chips

    锂离子电池片上集成用阳极氧化大孔硅阳极

    1 约7页 pdf
    出版日期： 2012
    标签： Porous silicon &#8211 lithium ion battery &#8211 anode &#8211 microbattery

    出版日期:2012

    作者单位:1.DepartmentofElectricalEngineering,WrightStateUniversity,Dayton,OH,USA2.DepartmentofMechanicalandMaterialsEngineering,WrightStateUniversity,Dayton,OH,USA3.DepartmentofElectricalEngineering,GroveCityCollege,GroveCity,PA,USA
    杂志名称:Journal of Electronic Materials
    卷号:41
    期数:9
    刊号:0361-5235
    出版日期:2012

    简介:Macroporoussiliconmembraneswereinvestigatedasanodesforpotentialintegrationoflithium-ionbatteriesonchips.Free-standingandpartiallyetchedporoussiliconmembraneswerefabricatedfromap-typesiliconwaferbyusingelectrochemicalanodization.Free-standingporousmembraneswereachievedwithhighaspectratioof40,averageporesizeof1μm,porosityaround~70%,andwallthicknessoflessthan0.1μm.Lithiumstoragecapacitywasquantifiedbygalvanostaticdischarge/chargemeasurements,showingspecificcapacityof1425mAh/gwithCoulombicefficiencyof81%inthefirstdischarge/chargecycle.Thedischarge/chargecapacitywasreducedasthechargerateincreased,andthecapacityfadingwasmuchlesspronouncedathighchargerate.Morphologicalanalysesshowedanincreaseofsurfaceroughnessandreductionofporosityafterlithiation/delithiationcycling.

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