Anodized Macroporous Silicon Anode for Integrationof Lithium-Ion Batteries on Chips
锂离子电池片上集成用阳极氧化大孔硅阳极
出版日期:2012
作者单位:1.DepartmentofElectricalEngineering,WrightStateUniversity,Dayton,OH,USA2.DepartmentofMechanicalandMaterialsEngineering,WrightStateUniversity,Dayton,OH,USA3.DepartmentofElectricalEngineering,GroveCityCollege,GroveCity,PA,USA杂志名称:Journal of Electronic Materials
卷号:41
期数:9
刊号:0361-5235
出版日期:2012
简介:Macroporoussiliconmembraneswereinvestigatedasanodesforpotentialintegrationoflithium-ionbatteriesonchips.Free-standingandpartiallyetchedporoussiliconmembraneswerefabricatedfromap-typesiliconwaferbyusingelectrochemicalanodization.Free-standingporousmembraneswereachievedwithhighaspectratioof40,averageporesizeof1μm,porosityaround~70%,andwallthicknessoflessthan0.1μm.Lithiumstoragecapacitywasquantifiedbygalvanostaticdischarge/chargemeasurements,showingspecificcapacityof1425mAh/gwithCoulombicefficiencyof81%inthefirstdischarge/chargecycle.Thedischarge/chargecapacitywasreducedasthechargerateincreased,andthecapacityfadingwasmuchlesspronouncedathighchargerate.Morphologicalanalysesshowedanincreaseofsurfaceroughnessandreductionofporosityafterlithiation/delithiationcycling.